BOC Edwards STPA2203C磁懸浮分子泵維修

 

Edwards STPA2203C is a new turbomolecular pump designed for use in semiconductor

applications. It has advanced rotor technology that gives class-leading performance for

maximum process flexibility. A new half rack controller gives additional space savings and

incorporates d.c. drive technology for battery-free operation. The STPA2203C has been

approved for use by major etch, ion implant and deposition equipment manufacturers in the

semiconductor and magnetic media industries

 

中山共享光電真空技術(shù)有限公司專業(yè)維修英國愛德華五軸磁懸浮分子泵，型號包含：Edwards STP 301  STP 451  STP 603  STP 1003 STP 301C  STP 451C STP 603C  STP 1003C

Edwards STP1003三軸磁懸浮分子泵，有人稱之為Edwards 1003，其中的STP不帶任何后綴的含義為：Ultra high vacuum Range，其內(nèi)部磁懸浮轉(zhuǎn)子采用3軸控制模式

 英國愛德華真空對STP系列三軸磁懸浮分子泵的描述的原文如下：

 

Edwards STP-H1303五軸磁懸浮分子泵，有人稱之為Edwards STPH1303，其中的H的含義為：High Throughput Range，其內(nèi)部磁懸浮轉(zhuǎn)子采用High Throughput Holweck Stage

 英國愛德華真空對STP-H系列五軸磁懸浮分子泵的描述的原文如下：

 

 

Edwards STP-A2203五軸磁懸浮分子泵，有人稱之為Edwards STPA2203，其中的A的含義為：Advantage Range，其內(nèi)部磁懸浮轉(zhuǎn)子采用Advanced  High Throughput Holweck Stage

 英國愛德華真空對STP-A系列五軸磁懸浮分子泵的描述的原文如下：

Used on new generation 300mm Etch platforms and flat panel display tools.

Advanced rotor designs and materials:

Gives a higher performance from a similar sized pump.

The rotors have 3D geometry improving their performance.

The Holweck stage has been redesigned with the blading on the rotor rather than the stator, this improves Throughput.

TMS : 65 deg-C (TMS set point)

                               with TMS connection box

Cooling water port : Swagelok 1/4”

                                with TMS valve

Purge port : VCR 1/4” female

Flange : ISO 250

Thermocouple: Included

Water valve : incuded

TMS : Red heater band
Edwards STP-A2203LVS

Customer : for LAM Versys

With communication port LON WORKS

          (control unit)

Cooling water port :reverse direction for purge

TMS : 60 deg-C (Standard)

          with TMS valve type 2ports valve

                  (standard used 3ports valve)

Pump : VE-type pump (P041-999)

TMS: 10 hole screw mounted metal type

Flange: ISO250

Thermocouple: Not included